Applied Physics Letters · 2012 · 73 citations · 31 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsThin FilmsDielectricsOrganic Electronic MaterialsSemiconductor Device MaterialsThin Film Electrical PropertiesThin-film MaterialsThin-film TransistorsCurrent DensityFabricationLeakage CurrentLeakage Current ReductionOrganic ElectronicsOrganic Thin FilmsOrganic Thin-film TransistorsUv-ozone Treatment
Organic thin film transistors have been fabricated on plastic substrates using a combination of two ultrathin insulating films, namely a 6 nm Al2O3 film (grown by UV-Ozone treatment of a pre-deposited aluminium film) and a 25 nm parylene C film deposited by vapour phase, as gate dielectric. They show a very low leakage current density, around 2 × 10−9 A/cm2, and, most importantly, can be operated at voltages below 1 V. We demonstrate that this low-cost technique is highly reproducible and represents a step forward for the routine fabrication of ultra-low voltage plastic electronics.
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