Applied Physics Letters · 1978 · 30 citations · 3 references
EngineeringElectrical EngineeringElectronic MaterialsMicrowave EngineeringSemiconductor DevicesHigh-frequency Semiconductor DevicesMicrowave Semiconductor DevicesOxide SemiconductorsBandwidthElectromechanical CouplingElectromechanical Coupling CoefficientHigh-frequency ElectronicsMonolithic Microwave Integrated Circuit DesignMonolithic Microwave Integrated CircuitsSawtooth Wave GeneratorsZinc Oxides
A monolithic metal-ZnO-SiO2-Si SAW convolver has been developed which not only displays the advantages of the monolithic configuration, but also possesses, due to utilization of high coupling Sezawa waves, a wide bandwidth heretofore only exhibited by LiNbO3 devices. We report here a bandwidth of 30 MHz at an input frequency of 225 MHz with a terminal efficiency of −56.9 dBm. The device displays an electromechanical coupling (Δv/v) of 0.019 which is the largest value yet reported for a ZnO device.
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Fabrication-related effects in metal-ZnO-SiO2-Si structures
M. Cornell, J. K. Elliott, R. L. Gunshor et al. · Applied Physics Letters · 1977 · 11 citations