Applied Physics Letters · 1979 · 27 citations · 4 references
Natural SciencesMaterials SciencePhysicsAcousticsMaterials CharacterizationThin FilmsAcoustic MaterialsAcoustic MeasurementAcoustic SensingAcoustic Wave PropagationPhysical AcousticsWave Propagation In StructuresAcoustic Characterization Of MaterialsAcoustic DispersionAcoustic Material CharacterizationAcoustic SignatureAcoustic Signature AnalysisAcoustic Signature MeasurementFilm ThicknessFilm Thickness Measurement
The reflection acoustic microscope has been used to measure SAW velocity dispersion and to indirectly measure the film thickness in a layered composite consisting of Au on a Si substrate. A quantitative thickness determination was made via the acoustic material signature technique, that is nondestructive and noncontacting. A theoretical prediction of SAW dispersion is in excellent agreement with these measurements.
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A model for predicting acoustic material signatures
R.D. Weglein · Applied Physics Letters · 1979 · 190 citations
Acoustic microscopy at optical wavelengths
V. B. Jipson, C. F. Quate · Applied Physics Letters · 1978 · 81 citations