Philosophical Magazine B · 1981 · 147 citations · 10 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsMaterials ChemistrySolid State PhysicsAmorphous MaterialsAmorphous SolidsChemical BondingSilicon MaterialsSurface Chemistry Of SolidsX-ray Photoelectron SpectroscopyAbsorption SpectraAlloy Composition EffectsAmorphous AlloysAmorphous SiliconAmorphous StructureInfrared Absorption SpectraInfrared Absorption SpectroscopyLine Width
Abstract XPS studies and infrared absorption measurements of the reactively sputtered (RS) amorphous SixC1–x: H alloy system have been made. The binding energy of the Si 2p core electrons decreases monotonically as the alloy composition x increases while the corresponding line-width remains almost constant. On the other hand, a curve of the C 1s core electron binding energy versus x has a kink at around x = 0·5∼0·6. Infrared absorption spectra reveal the existence of C–H, Si–H, Si–C bonds in the films. These results are discussed in terms of chemical bonding states.
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Substitutional doping of amorphous silicon
P. G. Le Comber · Solid State Communications · 1975 · 1.1K citations