Angular and energy distributions of H and He atoms backscattered from gold

Abstract

A clean Au target was bombarded with H and He ions with primary energies between 5 and 16 keV at normal incidence. The energy distributions of the backscattered particles at exit angles between 25° and 90° were measured. The angular distributions derived from these were cosine within the experimental errors. The experimental results were compared with computer simulations with the new TRIM program. There is satisfactory agreement between the measured and computed energy and angular distributions, but a considerable difference in the reflected intensities.