Japanese Journal of Applied Physics · 1995 · 28 citations · 41 references
Natural SciencesChemistryMaterials ScienceAnalytical ChemistryPolymer ChemistryPolymer MaterialsLaser SpectroscopyMass SpectrometryPolymer AnalysisPolymer Physical ChemistryPolymer PhysicsPolymerization ChemistryExcimer LasersLaser AblationLaser Ablation Mass SpectrometryLaser FluenceMultiphoton IonizationPhotothermal EffectsPolymer Mass SpectrometryPolystyrene
A multiphoton ionization-mass spectrometric study has been made on laser ablation of polymethylmethacrylate and polystyrene films by an excimer laser at 308 nm. “Unzipping” reactions occurred, i.e., neutral fragments ablating from the polymer surface were predominantly monomer and dimer methylmethacrylate and monomer and dimer styrene. Exponential dependence of fragment yields on ablating laser fluence and the Maxwell-Boltzmann-type velocity distributions of ablating species were found. They are due to an essentially thermal or photothermal ablation mechanism of these polymers in the experimental conditions.
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Excimer laser etching of polyimide
James H. Brannon, J. R. Lankard, A. I. Baise et al. · Journal of Applied Physics · 1985 · 386 citations
Natural Sciences, Materials Engineering, Materials Science +17
Direct etching of polymeric materials using a XeCl laser
James E. Andrew, P. E. Dyer, Daniel J. Förster et al. · Applied Physics Letters · 1983 · 382 citations
Natural Sciences, Materials Engineering, Materials Science +14