Concepedia

Growth of carbon thin film by low-energy mass-selected ion beam deposition

Hideki Ohno, Jaap van den Berg, S. NAGAI, D.G. Armour

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 29 citations · 7 references

DOI

Concepts

References

7

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

S. Aisenberg, Ronald Chabot · Journal of Applied Physics · 1971 · 1.2K citations

, , +1

Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy

P. Fallon, V.S. Veerasamy, C. A. Davis et al. · Physical review. B, Condensed matter · 1993 · 886 citations

, , +9

Molecular-dynamics simulation of the growth of diamondlike films by energetic carbon-atom beams

H.-P. Kaukonen, R. M. Nieminen · Physical Review Letters · 1992 · 224 citations · Full text

, , +15

Growth mechanisms of DLC films from C+ ions: experimental studies

Y. Lifshitz, G. Lempert, Eitan Grossman et al. · Diamond and Related Materials · 1995 · 184 citations

, , +17

Preparation and structure of carbon film deposited by a mass-separated C+ ion beam

Takeo Miyazawa, S. Misawa, Sadafumi Yoshida et al. · Journal of Applied Physics · 1984 · 159 citations

, , +16