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Thermodynamic Estimation of Oxidation Ability of Various Gases Used for the Preparation of Superconducting Films at High Vacuum

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2

References

1991

Year

Abstract

The oxidation ability of O 2 , O 3 , atomic oxygen, NO, N 2 O, and NO 2 was estimated by thermodynamic calculation. The calculation was carried out on the equilibrium state of Cu 2 O/CuO, considering the temperature dependence of Gibbs free energy of formation. Gases such as NO 2 , O 3 , and atomic oxygen were proven to have oxidation abilities higher than that of O 2 , showing good agreement with the results of oxide film formation by molecular beam epitaxy.

References

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