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Improvement of the crystalline quality of an yttria-stabilized zirconia film on silicon by a new deposition process in reactive sputtering

Materials EngineeringMaterials ScienceCrystalline QualityEngineeringSurface ScienceApplied PhysicsPulsed Laser DepositionReactive SputteringThin FilmsYttria-stabilized Zirconia FilmChemical DepositionChemical Vapor DepositionThin Film Processing