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High-k ZrO2 dielectric thin films on GaAs semiconductor with reduced regrowth of native oxides by atomic layer deposition

Materials ScienceGaas SemiconductorIi-vi SemiconductorEngineeringNative OxidesOxide ElectronicsApplied PhysicsSemiconductor MaterialThin FilmsMolecular Beam EpitaxyEpitaxial GrowthAtomic Layer Deposition