Publication | Closed Access
The observation of microvoids in device quality hydrogenated amorphous silicon
36
Citations
9
References
1989
Year
Electrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationApplied PhysicsDevice QualitySemiconductor Device FabricationAmorphous SolidSilicon On InsulatorMicroelectronicsSilicon Debugging
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