Concepedia

The oxidation of gallium nitride epilayers in dry oxygen

P. Chen, R. Zhang, Xinyi Xu, Yugang Zhou, Z. Z. Chen, Sheng-Wen Xie, W. P. Li, Yi Zheng

Applied Physics A · 2000 · 34 citations · 0 references

Concepts

Natural SciencesChemistryMaterials ScienceElectronic MaterialsInorganic ChemistrySurface ScienceOxidation ReactionsOxidation-reduction ReactionsReactive Oxygen SpeciesRedox ChemistryRedox ProcessesRedox ReactionsGallium NitrideGallium Nitride (Gan) Materials