Mid-frequency PECVD of a-SiCN:H films and their structural, mechanical and electrical properties - Concepedia

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Mid-frequency PECVD of a-SiCN:H films and their structural, mechanical and electrical properties

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14

References

2012

Year

S. Peter, Margarita Günther, S. Berg, André Clausner, Frank Richter

Materials EngineeringMaterials ScienceElectrical EngineeringMid-frequency PecvdEngineeringApplied PhysicsSemiconductor MaterialThin FilmsH FilmsElectrical PropertiesThin Film ProcessingCarbide

References

	Year	Citations

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