Replicable one-dimensional non-polarizing guided mode resonance gratings under normal incidence

Abstract

Polarization-insensitive guided-mode resonance (GMR) filters have significant role in applications such as optical communication systems. Here, we report the design and fabrication of two types of simple-structured one-dimensional (1D) GMR gratings with non-polarizing resonance properties under normal incidence. A single-layer rectangular-profile TiO2 grating is fabricated by electron beam lithography and reactive ion etching, which demonstrates, for the first time in experiment, almost perfect non-polarizing filtering effect with 1D grating under normal incidence. Then, a TiO2-coated polycarbonate 1D GMR grating is fabricated by nanoimprinting and atomic layer deposition, which also exhibits good non-polarizing property and the potential of low-cost mass replication of such functional devices.