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An investigation on the effect of high partial pressure of hydrogen on the nanocrystalline structure of silicon carbide thin films prepared by radio-frequency magnetron sputtering

Materials EngineeringMaterials ScienceEngineeringHigh Partial PressureNanotechnologyNanoelectronicsNanocrystalline StructureApplied PhysicsHydrogenThin FilmsRadio-frequency Magnetron SputteringNanocrystalline MaterialChemical Vapor DepositionThin Film ProcessingCarbide