Concepedia

Submicron dry-etching behavior of β-FeSi2 thin films towards fabrication of photonic crystals

A. Imai, Shunsuke Kunimatsu, Kensuke Akiyama, Yoshikazu Terai, Yoshihito Maeda

Thin Solid Films · 2007 · 11 citations · 3 references

DOI

Concepts

References

3

Computational electrodynamics, the finite-difference time-domain method

M. Rycroft · Journal of Atmospheric and Terrestrial Physics · 1996 · 9.5K citations

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Application of Radio-Frequency Discharged Plasma Produced in Closed Magnetic Neutral Line for Plasma Processing

Taijiro Uchida · Japanese Journal of Applied Physics · 1994 · 73 citations

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CO+NH3 plasma etching for magnetic thin films

Hitoshi Kubota, Kousei Ueda, Yasuo Ando et al. · Journal of Magnetism and Magnetic Materials · 2004 · 24 citations

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