Physical, structural and mechanical characterization of Ti1−xSixNy films - Concepedia

Concepedia

Publication | Closed Access

Physical, structural and mechanical characterization of Ti1−xSixNy films

86

Citations

14

References

1998

Year

F. Vaz, L. Rebouta, M.F. da Silva, J.C. Soares

Surface and Coatings Technology

Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsTi1−xsixny FilmsThin Film Process TechnologyThin FilmsThin Film Processing

References

	Year	Citations

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