Chemical vapor deposition of electrolyte thin films based on yttria-stabilized zirconia

Abstract

Gas-tight electrolyte films are obtained by chemical vapor deposition for solid oxide fuel cells from yttria-stabilized zirconia (YSZ) with a thickness of 4–15 μm on supporting porous ceramic anodes (YSZ/NiO). Volatile metal complexes with dipivaloylmethane Zr(dpm)4 and Y(dpm)3 are used as precursors. On the basis of an analysis of thermal properties of the starting compounds, parameter ranges in deposition processes are determined. Dependences of the structure, composition, and electrical characteristics on deposition conditions are found for YSZ electrolyte films. Electrochemical solid oxide fuel cells that operate at low temperatures with an open circuit voltage of 0.98–1.08 V and specific power up to 440 mW/cm2 at 1073 K and 1200 mW/cm2 at 1173 K are constructed.