Microstructure of high-purity Fe films deposited by the non-mass-separated ion beam deposition method - Concepedia

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Microstructure of high-purity Fe films deposited by the non-mass-separated ion beam deposition method

11

Citations

4

References

1998

Year

Kiyoshi Miyake, Kenya Ohashi

Materials Chemistry and Physics

Materials EngineeringMaterials ScienceIon ImplantationEngineeringApplied PhysicsThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructureHigh-purity Fe Films

References

	Year	Citations

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