Stretchable wavy metal interconnects

Abstract

Buckled, wavy metal stripes are promising candidates for interconnects in flexible and stretchable electronics. To obtain wavy metal films, 5 nm of Cr (for adhesion) and 20 nm of Au were evaporated on polydimethyl siloxane (PDMS) prestretched by 25%. The metals buckle to a wave upon release of the PDMS from the prestretched position. The electrical resistance of the Au was measured as a function of applied tensile strain. Results show the metal remains electrically conductive up to 100% strain and maintains electrical continuity under repeated mechanical deformation. Presented are the sample fabrication, surface topography, and results of experiments conducted on these stretchable wavy metals.