Vacuum · 1996 · 20 citations · 2 references
EngineeringChemical EngineeringInstrumentationGas SensorsLeak DetectionMeasurement System DesignMeasurement System ImplementationOutgassing Control
2
Outgassing Measurement by Switching Between Two Pumping Paths.
Kazuya Saito, Yukie Sato, Sakae INAYOSHI et al. · Shinku · 1995 · 10 citations · Full text
Engineering, Electrical Engineering, Analytical Chemistry +12