Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators

Abstract

The design and test of a frequency channel selection MEMS filter implemented on a commercial CMOS technology is presented. Mechanical coupling between two clamped-clamped beams is used to obtain 0.5% frequency bandwidth in a tunable 26 MHz bandpass filter with a very low bandpass distortion (less than 0.1 dB), which makes the filter suitable for wireless super-hetherodyne transceivers in communications standards such as GSM.