ACS Nano · 2009 · 98 citations · 44 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesFerroelectric MaterialsMemory DevicesMetal-oxide-semiconductor Field-effect TransistorsNanoelectronicsNanowiresSemiconductor Device MaterialsCharge StorageFerroelectric Thin FilmsMemory EffectsNanowire DevicesNanowire Field-effect TransistorsNanowire TransistorsNonvolatile Memory DevicesZinc Oxide Nanostructures
We report the fabrication and characterization of ZnO nanowire memory devices using a ferroelectric Pb(Zr(0.3)Ti(0.7))O(3) (PZT) film as the gate dielectric and the charge storage medium. With a comparison to nanowire transistors based on SiO(2) gate oxide, the devices were evaluated in terms of their electric transport, retention, and endurance performance. Memory effects are observed as characterized by an eminent counterclockwise loop in I-V(g) curves, which is attributed to the switchable remnant polarization of PZT. The single-nanowire device exhibits a high (up to 10(3)) on/off ratio at zero gate voltage. Our results give a proof-of-principle demonstration of the memory application based on a combination of nanowires (as channels) and ferroelectric films (as gate oxide).
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