Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2011 · 23 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceMaterials ChemistrySurface EngineeringSurface ScienceCoating ProcessesCoating TechnologyCoatingsIon ImplantationPlasma Surface TreatmentSurface CoatingsImplantation Through Thin FilmsIon Implantation EffectsPlasma Immersion Ion ImplantationPlasma-assisted Coating
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Structure and properties of TiN coatings
J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations
Natural Sciences, Materials Engineering, Materials Science +12