Solid State Communications · 1998 · 44 citations · 14 references
Natural SciencesMaterials SciencePhysicsElectronic MaterialsPlasma PhysicsSemiconductor DevicesHigh-temperature PlasmasHydrogen AtomPlasma-surface InteractionsSilicon MaterialsHydrogenated Amorphous SiliconPlasma Treatment
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Atomic and molecular hydrogen in the Si lattice
J. W. Corbett, Satya Narayan Sahu, Tiansheng Shi et al. · Physics Letters A · 1983 · 159 citations
Hydrogen Molecules in Crystalline Silicon Treated with Atomic Hydrogen
K. Murakami, Naoki Fukata, Shin‐ichi Sasaki et al. · Physical Review Letters · 1996 · 145 citations · Full text