Surface and Coatings Technology · 2007 · 19 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoatingsMetal Oxide NanomaterialsOxide SemiconductorsPlasma Surface TreatmentPlasma-surface InteractionsThin-film DepositionOxide Film FormationOxide Growth KineticsThin Oxide FilmsThin-film Oxides
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