Publication | Closed Access
Titanium oxide thin film growth by magnetron sputtering: Total energy flux and its relationship with the phase constitution
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Citations
39
References
2014
Year
Materials EngineeringMagnetismMaterials SciencePhase ConstitutionEngineeringPhysicsOxide ElectronicsApplied PhysicsMagnetron SputteringThin FilmsTotal Energy FluxMicrostructureThin Film Processing
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