Apodization technique for spurious mode suppression in AlN contour-mode resonators

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Gianluca Piazza, Philip J. Stephanou, Albert P. Pisano · Journal of Microelectromechanical Systems · 2006 · 633 citations · Full text

Engineering, Materials Science, Mechanical Engineering +17

1.156-GHz self-aligned vibrating micromechanical disk resonator

Jing Wang, Ziwu Ren, Clark T.‐C. Nguyen · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2004 · 284 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +14

High-Q UHF micromechanical radial-contour mode disk resonators

J.R. Clark, Wan-Thai Hsu, M.A. Abdelmoneum et al. · Journal of Microelectromechanical Systems · 2005 · 275 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +15

Impulse Model Design of Acoustic Surface-Wave Filters

C.S. Hartmann, D. T. Bell, R.C. Rosenfeld · IEEE Transactions on Microwave Theory and Techniques · 1973 · 245 citations

Natural Sciences, Electrical Engineering, Acoustics +11

Super-high-frequency two-port AlN contour-mode resonators for RF applications

Matteo Rinaldi, C. Zuniga, Chengjie Zuo et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2010 · 243 citations

Engineering, Electrical Engineering, Materials Science +16