HfO2 thin films prepared by ion beam assisted deposition - Concepedia

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HfO2 thin films prepared by ion beam assisted deposition

31

Citations

7

References

2003

Year

Takanori Mori, M. Fujiwara, Rafael R. Manory, Ippei Shimizu, Takeo Tanaka, Shoji Miyake

Surface and Coatings Technology

Materials ScienceEngineeringSurface ScienceApplied PhysicsThin FilmsChemical Vapor DepositionHfo2 Thin FilmsThin Film Processing

References

	Year	Citations

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