A comparison of a theoretical model and sensitivity factor calculations for quantification of sims data

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

Natural Sciences, Physics, Atomic Physics +13

Thermodynamic approach to the quantitative interpretation of sputtered ion mass spectra

Charles A. Andersen, James Hinthorne · Analytical Chemistry · 1973 · 436 citations

Natural Sciences, Chemistry, Analytical Chemistry +9

The application of nonequilibrium surface ionization to the emission of secondary ions

Z. Jurela · International Journal of Mass Spectrometry and Ion Physics · 1973 · 84 citations

Natural Sciences, Chemistry, Physical Chemistry +12

Evaluation of the local thermal equilibrium model for quantitative secondary ion mass spectrometric analysis

David S. Simons, J. E. Baker, C. A. Evans · Analytical Chemistry · 1976 · 80 citations

Natural Sciences, Chemistry, Analytical Chemistry +9

Quantitative Mass Spectrometry of Solids.

E. B. Owens, N. A. Giardino · Analytical Chemistry · 1963 · 59 citations

Natural Sciences, Chemistry, Analytical Chemistry +5