Thin Solid Films · 1990 · 21 citations · 6 references
Materials EngineeringMaterials ScienceEngineeringApplied PhysicsReactive Diode R.fCubic TiTib2 TargetThin Film Process TechnologyThin FilmsThin Film Processing
6
The deposition and study of hard carbon films
Jiajia Zou, K. Reichelt, K. Schmidt et al. · Journal of Applied Physics · 1989 · 197 citations
The preparation of cubic boron nitride films by reactive diode sputtering
Konrad Seidel, K. Reichelt, W. Schaal et al. · Thin Solid Films · 1987 · 39 citations