Plasma resistant aluminum oxide coatings for semiconductor processing apparatus by atmospheric aerosol spray method

Bonding mechanism in cold gas spraying

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Engineering, Materials Engineering, Materials Science +11

Understanding plasma spraying

P. Fauchais · Journal of Physics D Applied Physics · 2004 · 750 citations

Natural Sciences, Physics, Microfabrication +16

Aerosol Deposition of Ceramic Thick Films at Room Temperature: Densification Mechanism of Ceramic Layers

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Natural Sciences, Materials Engineering, Materials Science +17

Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices

Jun Akedo · Journal of Thermal Spray Technology · 2008 · 480 citations

Natural Sciences, Materials Engineering, Materials Science +16

Plasma‐Resistant Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process

Junichi Iwasawa, Ryoichi Nishimizu, Masahiro Tokita et al. · Journal of the American Ceramic Society · 2007 · 163 citations

Natural Sciences, Materials Engineering, Materials Science +17