Concepedia

Publication | Closed Access

Plasma resistant aluminum oxide coatings for semiconductor processing apparatus by atmospheric aerosol spray method

DOI

19

Citations

10

References

2010

Year

Hoomi Choi, Kwangsu Kim, Heesung Choi, Sang‐Woo Kang, Ju‐Young Yun, Yong‐Hyeon Shin, Taesung Kim
Surface and Coatings Technology

References

YearCitations

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