Sensors and Actuators B Chemical · 1998 · 48 citations · 2 references
EngineeringChemistryMaterials ScienceSemiconductor DevicesSemiconductor MaterialsSensorsChemical SensorsFluorescence SpectroscopyPhotodetectorsSensor MaterialsTemperature SensorsThermal SensorsFluorescence SensorsSemiconductor Sensor MaterialsSemiconductor Temperature Sensors
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Monitoring of HF and F2 using a field-effect sensor
Werner Moritz, Steffi Krause, A. A. Vasiliev et al. · Sensors and Actuators B Chemical · 1995 · 24 citations