Accumulation and annealing of implantation damage in a-Si:H - Concepedia

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Accumulation and annealing of implantation damage in a-Si:H

11

Citations

11

References

1991

Year

H. Stitzl, G. Kr�tz, G. M�ller

Applied Physics A

Materials EngineeringMaterials ScienceIon ImplantationEngineeringApplied PhysicsImplantation DamageSemiconductor Device FabricationSilicon On InsulatorMicroelectronics

References

	Year	Citations

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