An investigation of the experimental conditions and characteristics of a nano-wear test

Atomic Force Microscope

G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text

Natural Sciences, Materials Science, Physics +14

Scanning tunneling microscopy

G. Binnig, H. Rohrer · Surface Science · 1983 · 937 citations

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

IC-processed electrostatic synchronous micromotors

Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 175 citations

Engineering, Electrical Engineering, Mechatronics Engineering +12

High precision optical surface sensor

Tsuguo Kohno, Norimitsu Ozawa, Kozo Miyamoto et al. · Applied Optics · 1988 · 100 citations

Engineering, Materials Science, Optics +16