Narrow two-dimensional electron gas channels in GaAs/AlGaAs sidewall interfaces by selective growth

Abstract

Narrow two-dimensional electron gas (2DEG) channels have been fabricated for the first time on GaAs/Al0.3Ga0.7As sidewall interfaces by selective growth using metalorganic chemical vapor deposition (MOCVD). The 4-μm-wide 2DEG channels are formed on the {111}A facets by controlling the facet formation in the selective growth layers only through MOCVD growth conditions. The angular dependence of Shubnikov–de Haas oscillations has confirmed the existence of 2DEG on the {111}A facets.