Thin Solid Films · 1992 · 50 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsSurface ScienceThin FilmsChemical Vapor DepositionCoating ProcessesCoatingsSurface CoatingsThin-film DepositionTribological MaterialsCarbon CoatingsChemical Vapor Deposition CoatingsCoating TribologyFriction BehaviorFriction CoefficientPlasma-assisted CoatingSilicon Carbide (Sic) MaterialsSilicon Carbide Ceramics
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