Holographic fabrication of diamondlike photonic crystal template using two-dimensional diffractive optical elements

Abstract

This letter demonstrates holographic fabrication of three-dimensional diamondlike photonic crystal templates in SU8 photoresist using a single diffractive optical element. Five coherent laser beams produced by a two-dimensional phase mask were used to construct face-centered-cubic or tetragonal interference patterns. The superposition of two interference patterns through double exposures yields diamondlike photonic crystal templates in SU8. Photonic bandgap calculation reveals a full bandgap in inverse structures based on the template. The utilization of the two-dimensional phase mask simplifies the fabrication configuration in multiple beam holographic lithography for three-dimensional photonic fabrication.