Vapor Pressure of Di-<i>tert</i>-butylsilane

Abstract

The vapor pressure of di- tert -butylsilane [CAS Registry No. 30736-07-3] to be used in metalorganic vapor phase epitaxy (MOVPE) was measured by a static method in the technologically important temperature range from (241 to 288) K. The experimental data were fitted by the Antoine equation. To the best of our knowledge, this is the first time that the vapor pressure measurements of di- tert -butylsilane are reported.