50 GHz mm-Wave CMOS Active Inductor

Abstract

This letter presents a millimeter-wave active inductor circuit designed and fabricated in 65 nm bulk CMOS technology. The measurement results show an equivalent inductance of 133 pH with a quality factor exceeding 400 at 50 GHz, demonstrating experimentally for the first time the possibility to implement high- Q active inductors in CMOS technology operating at the mm-waves.