Effect of substrate temperature on the arrangement of ultra-thin TiO2 films grown by a dc-magnetron sputtering deposition - Concepedia

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Effect of substrate temperature on the arrangement of ultra-thin TiO2 films grown by a dc-magnetron sputtering deposition

36

Citations

28

References

2015

Year

Virginijus Bukauskas, S. Kačiulis, Alessio Mezzi, A. Mironas, Gediminas Niaura, Matas Rudzikas, Irena Šimkienė, Arūnas Šetkus

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringOxide ElectronicsSurface ScienceApplied PhysicsSubstrate TemperatureUltra-thin Tio2 FilmsThin FilmsDc-magnetron Sputtering DepositionChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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