Low temperature plasma enhanced CVD of highly conductive single crystalline and polycrystalline silicon materials - Concepedia

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Low temperature plasma enhanced CVD of highly conductive single crystalline and polycrystalline silicon materials

10

Citations

31

References

1989

Year

J. Nijs, Kris Baert, J. Symons, Kenji Kobayashi, Ph. Deschepper

Applied Surface Science

Materials ScienceEngineeringConductive Single CrystallineApplied PhysicsLow Temperature PlasmaGas Discharge PlasmaNonthermal PlasmaPolycrystalline Silicon MaterialsPlasma ProcessingPlasma ApplicationElectrical Insulation

References

	Year	Citations

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