The finite size effect in a planar inductively coupled plasma

Abstract

Plasma parameters from the measured electron energy distribution are obtained with changing the chamber height at low pressure 2 mTorr. It is observed that electron density has a local peak at a certain chamber height while electron temperature decreases monotonously with increasing chamber height. The chamber height with the maximum electron density is shifted according to the bounce resonance condition when the driving frequency is changed. The electron kinetic model well agrees with the experiment. This shows that the electron density peak against the plasma size is due to the electron bounce resonance that has been theoretically discussed.