Comparative study of NH4OH and HCl etching behaviours on AlGaN surfaces - Concepedia

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Comparative study of NH4OH and HCl etching behaviours on AlGaN surfaces

35

Citations

22

References

2009

Year

Rakesh Sohal, Piotr Dudek, Oliver Hilt

Applied Surface Science

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringAlgan SurfacesSurface ScienceApplied PhysicsAluminum Gallium NitrideMicroelectronicsPlasma EtchingComparative StudyCategoryiii-v SemiconductorSurface Processing

References

	Year	Citations

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