Publication | Closed Access
Hydrogen-decorated lattice defects in proton implanted GaN
52
Citations
20
References
1998
Year
Wide-bandgap SemiconductorSemiconductor TechnologyEngineeringCrystalline DefectsPhysicsApplied PhysicsHydrogen-decorated Lattice DefectsAluminum Gallium NitrideNitrogen-dangling-bond DefectsGan Power DeviceHydrogenCategoryiii-v SemiconductorVga DefectsVga–hn Complexes
Several vibrational bands were observed near 3100 cm−1 in GaN that had been implanted with hydrogen at room temperature and subsequently annealed. Our results indicate that these bands are due to nitrogen-dangling-bond defects created by the implantation that are decorated by hydrogen. The frequencies are close to those predicted recently for VGa–Hn complexes, leading us to tentatively assign the new lines to VGa defects decorated with different numbers of H atoms.
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