Concepedia

Microstructural and electrical characteristics of reactively sputtered ZrNx thin films

Jian‐Long Ruan, Ding‐Fwu Lii, Horng‐Hwa Lu, Jen‐Sue Chen, Jow-Lay Huang

Journal of Alloys and Compounds · 2008 · 16 citations · 28 references

DOI

Concepts

References

28

X-ray diffraction procedures

Harold P. Klug, Leroy Alexander · CERN Document Server (European Organization for Nuclear Research) · 1954 · 4.2K citations

Thermal stability of nitride thin films

Lars Hultman · Vacuum · 2000 · 627 citations

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Oxidation of metastable single-phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms

D.C. McIntyre, J. E. Greene, G. Håkansson et al. · Journal of Applied Physics · 1990 · 536 citations

, , +17

Mechanisms of reactive sputtering of titanium nitride and titanium carbide I: Influence of process parameters on film composition

J.‐E. Sundgren, B.-O. Johansson, Susanne Karlsson · Thin Solid Films · 1983 · 180 citations

, , +17

X‐Ray photoelectron spectroscopic studies of the surface of sputter ion plated films

Kevin S. Robinson, Peter M. A. Sherwood · Surface and Interface Analysis · 1984 · 135 citations

, , +17