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High performance silicon free-standing anodes fabricated by low-pressure and plasma-enhanced chemical vapor deposition onto carbon nanotube electrodes

Chemical EngineeringEngineeringFree-standing AnodesCarbon Nanotube ElectrodesMetal AnodeApplied PhysicsSemiconductor Device FabricationVacuum DeviceHigh PerformancePlasma ProcessingChemical Vapor Deposition