Continuous nanoparticle generation and assembly by atmospheric pressure arc discharge

Abstract

This letter describes a nanoparticle generation and deposition system which combines aspects of high temperature plasmas with room temperature aerosols. The process works at atmospheric pressure and produces nanoparticles of Au or ZnO through cathode erosion inside a dc arc discharge plasma. The particles are positively charged by the arc and form a room temperature aerosol. From the aerosol, nanoparticles assemble on conductive sample surfaces through openings in patterned resist with resolution enhanced by electrodynamic nanolenses. We report that continued operation of the system results in funneled deposition of nanoparticles into well positioned three dimensional nanostructures.