Publication | Closed Access
Deposition and characterization of TiAlN/TiAlON/Si3N4 tandem absorbers prepared using reactive direct current magnetron sputtering
96
Citations
31
References
2007
Year
Materials EngineeringMaterials ScienceElectrical EngineeringTialn/tialon/si3n4 Tandem AbsorbersEngineeringSurface ScienceApplied PhysicsMicroelectronics
| Year | Citations | |
|---|---|---|
Page 1
Page 1