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Structural and electrical properties of Sb-doped p-type ZnO thin films fabricated by RF magnetron sputtering

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsRf MagnetronGallium OxideSemiconductor MaterialThin FilmsElectrical PropertiesThin Film Processing